For EOM, we adopt one-dimensional photonic-crystal nanobeam as the basic underlying structure (Fig. The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. Zhou, B., Li, E., Bo, Y. Broadband modulation of light by using an electro-optic polymer. Zhang, M., Wang, C., Cheng, R., Shams-Ansari, A. Lett. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. Broadband electro-optic frequency comb generation in a lithium niobate microring resonator. Google Scholar. CAS Ultrafast electro-optic light with subcycle control. Cite this article. These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in B. Attojoule optoelectronics for low-energy information processing and communications. and A.S. fabricated the devices. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. A 10-Gbit/s lithium niobate intensity module provides chirp-free modulation at 1550 nm. C.W., M.Z., X.C. The images or other third party material in this article are included in the articles Creative Commons license, unless indicated otherwise in a credit line to the material. Weigel, P. O. et al. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. The energy efficiency of the LN photonic-crystal EOM can be further improved since our current devices are not optimized. Femtojoule electro-optic modulation using a silicon-organic hybrid device. Aoki, M. et al. As an example application, we applied NRZ signal with a (271)-bit pseudo-random binary sequence (PRBS) to an EOM with a Vpp of 2.0V. Figure7b, c shows the recorded eye diagrams at two different bit rates of 9 and 11Gbs1, respectively, which show clear open eyes. Compact 1D-silicon photonic crystal electro-optic modulator operating with ultra-low switching voltage and energy. [29] Owing to the disparity between the dielectric constants of lithium niobate and silica, the electrical field primarily affected the LN core through the slab. Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. Xinlun Cai, of Sun Yat -sen University, led a team that designed and fabricated a thin-film lithium niobate (TFLN) dual polarization in-phase and quadrature (DP-IQ) modulator, which sets new world . Article A 100, 043811 (2019). a Recorded transmission spectra of the \({\mathrm{{TE}}}_{01}^{0}\) cavity mode with RF driving signal at seven different powers from 0 to 12mW, with a power step of 2mW, modulated at 0.6GHz. Velocity matching can be achieved with an oxide thickness of about 4,700nm. Thanks to the strong light confinement, we are able to place the electrode fairly close to the cavity without introducing extra optical loss (Fig. This work is supported in part by the National Science Foundation (NSF) (ECCS1609549, ECCS-1740296 E2CDA and DMR-1231319) and by Harvard University Office of Technology Development (Physical Sciences and Engineering Accelerator Award). On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. CAS Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . Karpiski, M., Jachura, M., Wright, L. J. ISSN 2041-1723 (online). The device also exhibits a second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\) (Fig. Opt. Open Access articles citing this article. and M.B. ADS 3, 9194 (2009). High modulation efficiency lithium niobate Michelson interferometer modulator. 42.25.p. 4b, the \({\mathrm{{TE}}}_{01}^{0}\) mode exhibits a high loaded optical Q (QL) of 1.34105, which is very close to our numerical simulation, indicating the negligible impact of the electrodes on the optical quality. 1a) since it supports compact optical and electrical integration to enhance the electro-optic response. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210. Opt. Google Scholar. We first assess the performance of our high symbol rate transmitter . Lett. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Loncar and his team used small but powerful distributed feedback lasers for their integrated chip. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. Nat. volume562,pages 101104 (2018)Cite this article. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. 4, 518526 (2010). supervised the project. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. and S.C. carried out the device characterization. Single-chip microprocessor that communicates directly using light. 100G/400G LN Modulator. To show this feature, we selected another similar device on the same chip, which has a lower loaded optical Q of 14,000. @article{Hu2023DynamicallyTS, title={Dynamically tunable single-/dual-band of the graphene absorber with a resonant asymmetric grating based on lithium niobate on insulator}, author={Jinhua Hu and Lili Sun and Lei Li and Xiuhong Liu and Danping Ren and Jijun Zhao}, journal={Optics Communications}, year={2023} } Lithium niobate photonic-crystal electro-optic modulator. Science 318, 15671570 (2007). Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. Streshinsky, M. et al. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Sun, C. et al. C.W. Thin-film lithium niobate (TFLN) based traveling-wave modulators maintain simultaneously excellent performances, including large modulation bandwidth, high extinction ratio, low optical loss, and high modulation efficiency. Therefore, the electrodes can be shrunk to 103m2, which would reduce the capacitance considerably to ~0.27fF (~1.0fF if including the integrated wires36), according to our FEM simulations. a is the lattice constant. Nature 528, 534538 (2015). 8b), which, however, might sacrifice the optical Q due to metallic losses. Boes, A., Corcoran, B., Chang, L., Bowers, J. 35, 346396 (2017). Li, M. et al. 1e) to achieve a critical coupling. Nature 435, 325327 (2005). The key modulation waveguide structure is a field-enhanced slot waveguide formed by embedding silicon nanowires in a thin-film lithium niobate (LN), which is different from the previously . Nature 556, 483486 (2018). Correspondence to 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. The 50-m width of the electrode (Fig. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. You are using a browser version with limited support for CSS. Rev. fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. 03 April 2023, Nature Communications & Fan, S. Complete optical isolation created by indirect interband photonic transitions. To date, it remains an open challenge in realizing a high-speed and energy-efficient modulator at the wavelength scale on the monolithic LN platform. Ghelfi, P. et al. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. Science 361, 13581363 (2018). 7a shows another example of a device with optical Q of 20,000, which exhibits a 3-dB bandwidth of about 12.5GHz. 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. Lett. Photon-level tuning of photonic nanocavities. Opt. 24, 3400114 (2018). ADS The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. 35, 411417 (2017). Laser Photonics Rev. Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. The authors thank Professor Hui Wu and Professor Wayne Knox for the use of their equipment. They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. Koeber, S. et al. For direct CMOS driving, the RF amplifier is bypassed. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. ac, Normalized optical transmission of the 20-mm (a), 10-mm (b) and 5-mm (c) device as a function of the applied voltage, showing half-wave voltages of 1.4V, 2.3V and 4.4V, respectively. 11, 441446 (2017). 1f). By submitting a comment you agree to abide by our Terms and Community Guidelines. Enhanced electro-optic lithium niobate photonic crystal wire waveguide on a smart-cut thin film. Liu, J. et al. wrote the manuscript with contribution from all authors. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. 314, 317 (2014). & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation. 1d). New light sheet holography overcomes the depth perception challenge in 3D holograms, First-of-its-kind metalens can focus extreme ultraviolet light, An unprecedented look at biological energy on the sub-cellular level, Harvard John A. Paulson School of Engineering and Applied Sciences. J. Lightwave Technol. This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. carried out the device characterization. Carlson, D. R. et al. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. Nature 568, 373377 (2019). Li, M., Ling, J., He, Y. et al. Rao, A. et al. Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. Alloatti, L. et al. a Schematic of half of the cross-section of the EOM structure. EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. conceived the experiment. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Preprint at https://arxiv.org/abs/1803.10365 (2018). We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Fortier, T. M. et al. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. 27), which is about 22fJ per bit in our EOM. IEEE J. Sel. Phys. Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. a Schematic of the LN photonic-crystal EOM. Sci. a Full SEM image of the whole-device structure. 1g) at 1604.13nm (not shown) with a loaded optical Q of 3.03104. a Laser-scanned transmission spectrum in the telecom band. Yu, Z. Our traveling-wave design and advanced index-matching technologies enable optical response over the entire millimeter-wave spectrum (up to 300 GHz). The laser wavelength is scanned at a repetition rate of ~15Hz, so we primarily monitored the time-averaged cavity transmission. Weigel, P. O. et al. & Lin, Q. High-Q 2D lithium niobate photonic crystal slab nanoresonators. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Appl. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. 6, 6982 (2000). The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Integrated modulator platforms based on materials such as silicon, indium phosphide or polymers have not yet been able to meet these requirements simultaneously because of the intrinsic limitations of the materials used. 6b). As shown in Fig. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. Nat. Lithium niobate photonic-crystal electro-optic modulator, https://doi.org/10.1038/s41467-020-17950-7. CAS The authors declare no competing interests. 5, 425429 (2011). b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. Q.L. Electro-optic modulators translate high-speed electronic signals into the optical domain and are critical components in modern telecommunication networks1,2 and microwave-photonic systems3,4. Laser Photon. supervised the project. They are close to those of a conventional Mach-Zehnder modulator with a straight modulation section. https://doi.org/10.1038/s41586-018-0551-y, Complementary Metal Oxide Semiconductor (CMOS). Quantum Electron. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in However, negligible degradation observed between Fig. Hybrid silicon photonic-lithium niobate electro-optic MachZehnder modulator beyond 100 GHz. Nat. are involved in developing lithium niobate technologies at HyperLight Corporation. 5a, the cavity resonance tunes smoothly with the applied voltage, without any degradation to the lineshape or coupling depth, clearly showing the pure dispersive electro-optic tuning as expected from the Pockels effect. When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. Rev. Opt. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a racetrack resonator as a wavelength filter to suppress the sidebands of the reverse propagating . To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. e, Group refractive indices for both optical and microwave signals as a function of the buried oxide thickness. Phys. Liu et al. 8b. Extended Data Fig. A review of lithium niobate modulators for fiber-optic communications systems. B. Attojoule optoelectronics for low-energy information processing and communications. Lithium niobate piezo-optomechanical crystals. Nozaki, K. et al. Wang, C. et al. The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Express 26, 15471555 (2018). Opt. conceived the experiment. Haffner, C. et al. Express 22, 2862328634 (2014). It, however, degrades considerably the optical Q of the cavity (Fig. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. External modulator is typically either a LiNbO3 modulator or an electroabsorptive modulator. Express 26, 1481014816 (2018). Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. Opt. The sum of all gray curves is showed in red, which is fitted by the theory. Optical modulators, using acousto-optic, magneto-optic or electro-optic effects, as the principal components for external modulation of lightwaves, have presently played the important role in modern long-haul ultra-high speed optical communications and photonic signal processing systems. b Same as a but with a modulation frequency of 2.0GHz. Appl. Figure3 illustrates the schematic of the experimental testing setup, where the inset shows an optical image of the device with the RF probe in contact. Photon. In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. For simplicity of testing, the EOM is designed such that light is coupled into and out of the EOM via only one side of the cavity (Fig. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. PubMedGoogle Scholar. Laser Photonics Rev. Internet Explorer). Figure2 shows a fabricated device (see Methods for the details of device fabrication). Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Opt. Such a configuration reduces the critical requirement of electrode alignment as needed in . b, c Electro-optic tuning efficiency and optical quality factor of the device as a function of Gap and tw, simulated by the FEM method. Electron. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. Gigahertz speed operation of epsilon-near-zero silicon photonic modulators. CAS 29 Oxford Street, Cambridge, MA 02138, Research paves the way for high-powered telecommunication systems, 2023 President and Fellows of Harvard College, First integrated laser on lithium niobate chip. To maximize the electro-optic interaction, we utilize a partially etched structure with a rib-waveguide-like cross-section, leaving a 150-nm-thick wing layer for the electrodes to sit on (Fig. Thank you for visiting nature.com. Express 23, 2352623550 (2015). Phys. Photon. We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level. and M.L. Opt. Optical and RF characterization of a lithium niobate photonic crystal modulator. This phenomenon is shown more clearly in Fig. Science 358, 630632 (2017). Nat. Coherent modulation up to 100 GBd 16QAM using silicon-organic hybrid (SOH) devices. Photon. Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. LiNbO. Nature Communications (Nat Commun) b, High-speed data modulation set-up. https://doi.org/10.1038/s41467-020-17950-7, DOI: https://doi.org/10.1038/s41467-020-17950-7. e Lattice constant a as a function of position, which is optimized for low insertion loss together with high radiation-limited optical Q. f Top view of the FEM-simulated optical mode field profile of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\). Javid, U. Electron. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. 2 High-speed measurement set-ups. The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. Integrated microwave photonics. Article The inset shows an optical microscopic image of an EOM with the RF probe in contact. Optica 4, 15361537 (2017). Miller, D. A. The velocity-matched modulator has a typical insertion loss of 4 dB, drive voltage of 5 V, and electrical return loss of . Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z With these devices, we are able to demonstrate efficient electrical driving of high-Q cavity mode in both adiabatic and non-adiabatic regimes and to observe transition in between. This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. IEEE 94, 952985 (2006). Energy efficiency, operation speed, and device dimension are thus crucial metrics underlying almost all current developments of photonic signal processing units. All of these applications require chip-scale electro-optic modulators that operate at voltages compatible with complementary metaloxidesemiconductor (CMOS) technology, have ultra-high electro-optic bandwidths and feature very low optical losses. Optica 1, 112118 (2014). PubMed Top. Article As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. In the meantime, to ensure continued support, we are displaying the site without styles Open Access Upconversion of light from its fundamental wavelength (FW) to its second harmonic (SH) is enhanced 32 in micron-scale lithium niobate (LiNbO3) spheres through near-field interactions with gold . 1f), so as to take the advantage of the largest electro-optic component r33 of LN. We achieve this by engineering the microwave and photonic circuits to achieve high electro-optical efficiencies, ultra-low optical losses and group-velocity matching simultaneously. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. The current generation of lithium niobate modulators are bulky, expensive, limited in bandwidth and require high drive voltages, and thus are unable to reach the full potential of the material. In 2015 Optical Fiber Communications Conference and Exhibition 13 (2015); https://doi.org/10.1364/OFC.2015.Th4E.3. Photon. Optica 6, 845853 (2019).
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